Innovative mechanical design

XENOS adopts a completely new mechanical design concept. Unlike standard bridge measuring machines, the Y-rail is distributed on the top of the side wall, and the separated travel axis only moves the crossbeam in the Y-axis direction, resulting in a smaller and constant moving weight - a true advantage compared to mobile platforms. The lower and constant moving weight creates a perfect unity of acceleration and high speed.

All axes are driven linearly

All axes of XENOS are driven linearly. Its advantages include high speed, extremely fast acceleration, high positioning accuracy, and no shear force impact on the drive. Combined with ultra-high resolution grating ruler technology, the linear drive of XENOS can achieve high stability and extremely high positioning accuracy below 100 nanometers. For example, the more constant the offset of the measuring needle, the better the measurement accuracy can be obtained. Another advantage is more evident when measuring surfaces: the more the movement path of the measuring needle matches the predetermined value, the better the accuracy can be achieved.

Virtual central driver

XENOS is equipped with a bilinear drive system in the Y-axis, thanks to Zeiss' central drive technology for excellent synchronous control. This technology can perfectly distribute driving force according to the X-axis position. As a perfect combination of control systems and algorithms, this is a key factor in achieving excellent measurement accuracy and motion stability throughout the entire measurement range.

silicon carbide ceramic

XENOS uses innovative silicon carbide ceramic materials on machine components closely related to accuracy. So far, this material has never been used on similar products or precision measuring machines. Compared with conventional ceramics, the thermal expansion of silicon carbide ceramics is reduced by about 50%, while the rigidity can be increased by 30% and the weight can be reduced by 20%. Compared to steel, silicon carbide ceramics can still achieve twice the rigidity despite reducing their weight by 50%.

Enhanced VAST Gold

XENOS uses Zeiss VAST gold measuring probe. During the research and development process, Zeiss optimized the probe in terms of measurement accuracy and repeatability. XENOS also adopts a new type of rigid connection. The VAST gold probe can be used with measuring needles up to 800 millimeters in length and weighing up to 500 grams, including asymmetric measuring needles.

Optimized air bearing

The newly reinforced air bearing has excellent stability and measurement accuracy.

Improved electronic design

Through a brand new electronic design, the impact of mobile cables on accuracy has been significantly reduced. The computer-aided accuracy correction (CAA) method and special additional CAA correction techniques play an increasingly important role in achieving high measurement accuracy.